Porvair
Microelectronics
Porvair manufactures a wide range of high purity porous media and reliable, high efficiency filtration products. These ensure extreme cleanliness in critical semiconductor and microelectronics gas handling and delivery applications, including:
– Gas safety management
– Exhaust venting systems
– Flow control
– Mass flow control
– Needle valve replacement
– Laminar flow diffusing
– Pressure snubbing
– Flame arresting.
We can custom engineer solutions for the most demanding applications, using porous PTFE membrane, Sinterflo®F sintered metal fibre and Sinterflo® P sintered metal powder media.
Materials of construction
Our wide range of porous media includes a variety of pore sizes and material properties. These high efficiency filters are offered in:
– PTFE membrane
– 316L stainless steel Sinterflo® F sintered metal fibre
– 316L stainless steel Sinterflo® P sintered metal powder
– Nickel Sinterflo® F sintered metal fibre
– Nickel Sinterflo® P sintered metal powder
– Hastelloy® C22 Sinterflo® P sintered metal powder.
Service in severe environments
Our GasProTM filter media provides excellent mechanical strength, enhanced corrosion resistance and elevated temperature service in severe environments.
Mechanical strength
The filter media and supporting structure are designed to withstand the highest pressure differential. The mechanical strength of the 316L stainless steel filter housings will provide reliable service.
Temperature resistance
316L stainless steel or nickel construction provides elevated temperature service up to 500°C (930°F). Hastelloy®C22 construction is rated for 700°C (1290°F) in reducing or inert gas applications. With PTFE filter media, the filters are rated up to 120°C (250°F).
Corrosion resistance
Our GasProTM filter hardware features electro polished surfaces to prevent corrosion and particle formation for years of reliable service. Robust construction and excellent corrosion resistance allow for service in a wide range of processing gases.
GasPro™ In-Line Gas Filters
Porvair GasPro™ high purity gas filtration products protect critical processes from potential defect causing, yield limiting particles. These in-line gas filters are installed at the point-of-source for complete line protection or at the point-of-use to protect etch, CVD, PVD, thermal, and other critical dry processes.
Regardless of process gas and flow, Porvair’s broad range of in-line gas filter options can meet the requirement. Porvair filtration medias include PTFE and sintered 316L stainless steel, nickel, and Hastelloy® C22 in electro-polished 316L stainless steel (or Hastelloy® C22) housings.
To fit a wide range of applications, GasPro™ filters are available with a wide variety of end connections and sizes. Fitting choices include male and female face seal (VCR®), butt weld, compression, and NPT connections, depending on the filter. Fitting sizes can range from ¼” to 1 ½”. Metric sizes are available upon request.
Features and benefits
Superior filter efficiency
Our porous PTFE and sintered metal filters are proven to provide greater than 9 LRV (99.9999999%) particle retention efficiency at 0.003μm (3 nanometers) and at the most penetrating particle size of 0.8 microns.
Service in severe environments
Porous Sinterflo® sintered metal media provides excellent mechanical strength, enhanced corrosion resistance and elevated temperature service in severe environments. PTFE membranes are highly compatible with every process gas.
TTemperature resistance
GasPro™ filters are available for elevated temperature service up to 500°C (930°F) and an all Hastelloy® C22 construction is rated for 700°C (1290°F) in inert gas applications.
Cleanliness and best in class quality
Our point of use filters are manufactured in a Class 100 Cleanroom using an ISO 9001 Certified Quality System. This insures particle free, chemically clean, organic free handling and bagging, maximizing the out-of-package cleanliness. A DI water flush and a high pressure, 0.003μm filtered nitrogen flush removes particles and prevents particle shedding. Most GasPro™ filters are vacuum dried to less than 10ppb moisture and the organics are less than 10ppb THC.